The passline is 400mm! It will be cleaned with SPM and neutral detergent + US, and dried with warm water extraction.
We would like to introduce our "Mask Glass Cleaning Device."
The mask glass is stored in an original cassette and cleaned using SPM and a neutral detergent + US, followed by drying with warm water.
The process is carried out in the following order: LD → Underwater → SPM → Rinse → Rinse → Neutral Detergent + US → Rinse + US → Rinse → SC-1 → Rinse → Rinse + MUS → Rinse → Warm Water Lift → ULD.
【Main Specifications】
■ Conveying Direction: Left → Right
■ Passline: 400mm (LD, ULD)
■ Substrate Mask: min 9”×9” to max 24”×24”
■ Main Body Dimensions (Material)
・PVC Wrapped (Ivory): 8000W×2350D×2600H (2900H)
・Frame: Made of SUS304
*For more details, please refer to the PDF document or feel free to contact us.